Effect of Catalyst on the Growth of Diamond-like Carbon by HFCVD

الموضوعات : Journal of Physical & Theoretical Chemistry

M. Aghaie ¹ , M. Ghoranneviss ² , Z. Purrajabi ³

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تاريخ الإرسال : 16 الثلاثاء , رجب, 1436 تاريخ التأكيد : 16 الثلاثاء , رجب, 1436 تاريخ الإصدار : 16 الثلاثاء , رجب, 1436

الکلمات المفتاحية: Diamond like carbon, DLC, HFCVD, Raman sepectroscopy,

ملخص المقالة :

Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)technique. In the present work, we investigated the quality of the DLC films groew on the substratesthat were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 rendersthe growth of carbon nanostructures technique (diamond like carbon). The utilized samples werecharacterized by the scanning electron microscopy (SEM) and Raman spectroscopy techniques.