Optical imaging and magnetic field simulation of a DC circular planar magnetron sputtering discharge
Subject Areas : Journal of Theoretical and Applied Physics
Ahmad Rastkar
1
(Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran)
Ali Reza Niknam
2
(Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran)
Mostafa Salahshoor
3
(School of Physics, Iran University of Science and Technology, Tehran, Iran)
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Abstract :