Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation

Subject Areas : Journal of Theoretical and Applied Physics

Mansour Khoram ¹ , Hamid Ghomi ²

1 - Department of Physics, Borujerd Branch, Islamic Azad University
2 - Laser and Plasma Research Institute, Shahid Beheshti University

Accepted : 2016-03-01 Published : 2016-03-01

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