Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation

Subject Areas : meso/micro/nano fabrication

Mohammad Tahmasebipour ¹ , Younes Tahmasebipour ² , Ali Vafaie ³

1 - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
2 - Micro/Nano-Fabrication Technologies Development Laboratory, Faculty of New sciences & Technologies, University of Tehran, Tehran, Iran
3 - Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

Received: 2018-11-23 Accepted : 2019-04-08 Published : 2019-06-01

Keywords:

References:

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