Design and simulation of novel RF MEMS cantilever switch with low actuation voltage

Subject Areas : Majlesi Journal of Telecommunication Devices

Bahram A. Ganji ¹ (Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran)
Khadijeh Khodadady ² (Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran)

Received: 2014-12-06 Accepted : 2014-12-16 Published : 2014-12-01

Keywords:

References:

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[15] B. A. Ganji and B. Y. MAjlis,(2009) “Fabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphrag’’ International journal of Nonlinear Dynamics in Engineering and Sciences. 1:1, pp. 47-57.