Determination of Residual Stress of PACVD Nanostructure TiN Coatings by GIXRD Method

Subject Areas : Surface Engineering

Mahdi Raoufi ¹ , A. Zolanvari ² , Majid zarezadeh ³

1 - Department of Materials Science and Engineering, Faculty of Engineering, Arak University, Arak 38156-8-8349, Iran
2 - b Department of Physics, Faculty of Science, Arak University, Arak, Iran.
3 - a Department of Materials Science and Engineering, Faculty of Engineering, Arak University, Arak 38156-8-8349, Iran.

Received: 2017-07-04 Accepted : 2018-10-20 Published : 2018-11-05

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