Effect of N2 partial pressure on the structural and mechanical properties of TaN films

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Journal of Advanced Materials and Processing

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Manuscript ID : JMATPRO-1605-1255 (R1) Visit : 121 Page: 30 - 36

Article Type: Original Research

Subject Areas : Chemistry

mehdi manouchehrian ¹

1 - south Tehran branch, Islamic azad university, Tehran, iran

Received: 2016-05-31 Accepted : 2016-09-28 Published : 2016-12-01

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