Mechanical Behavior of an Electrostatically-Actuated Microbeam under Mechanical Shock
محورهای موضوعی : Engineering
M Fathalilou
1
(Sama Organization (Affiliated with Islamic Azad University), Khoy Branch)
A Motallebi
2
(Department of Mechanical Engineering, Islamic Azad University, Khoy Branch)
H Yagubizade
3
(Department of Mechanical Engineering, Urmia University)
Gh Rezazadeh
4
(Department of Mechanical Engineering, Urmia University)
K Shirazi
5
(Sama Organization (Affiliated with Islamic Azad University), Khoy Branch)
Y Alizadeh
6
(Sama Organization (Affiliated with Islamic Azad University), Khoy Branch)
کلید واژه: MEMS, Microbeam, Electrostatic actuation, Pull-in voltage, Mechanical shock,
چکیده مقاله :
In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are not generally available; therefore, the obtained differential equations have been solved by using of a step by step linearization method (SSLM) and a Galerkin based reduced order model. The pull-in voltage of the structure and the effect of shock forces on the mechanical behavior of undeflected and electrostatically deflected microbeam have been investigated. The proposed models capture the other design parameters such as intrinsic residual stress from fabrication processes and the nonlinear stiffening or stretching stress due to beam deflection.
[1] Basso M., Giarre L., Dahleh M., Mezic I., 1998, Numerical analysis of complex dynamics in atomic force microscopes, in: Proceedings of the IEEE International Conference on Control Applications, Trieste, Italy, 1-4 September: 1026-1030.
[2] Fritz J., Baller M.K., Lang H.P., Rothuizen H., Vettiger P., Meyer E., Gntherodt H.J., Gerber C., Gimzewski J.K., 2001, Translating bio-molecular recognition into nanomechanics, Science 288: 316-318.
[3] Sidles J.A., 1991, Noninductive detection of single proton-magnetic resonance, Applied Physics Letters 58(24): 2854-2856.
[4] Nabian A., Rezazadeh Gh., Haddad-Derafshi M., Tahmasebi A., 2008, Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure, Microsystem Technologies 14: 235-240.
[5] Senturia S., 2001, Microsystem Design, Kluwer, Norwell, MA, USA.
[6] Rezazadeh Gh., Sadeghian H., Abbaspour E., 2008, A comprehensive model to study nonlinear behaviour of multilayered micro beam switches, Microsystem Technologies 14(1): 143.
[7] Sadeghian H., Rezazadeh Gh., Osterberg P.M., 2007, Application of the generalized differential quadrature method to the study of pull-in phenomena of mems switches, Journal of Microelectromechanical Systems 16(6).
[8] Osterberg P.M., Senturia S.D., 1997, M-Test: a test chip for MEMS material property measurement using electrostatically actuated test structures, Journal of Microelectromechanical Systems 6: 107-118.
[9] Abdel-Rahman E.M., Younis M.I., Nayfeh A.H., 2002, Characterization of the mechanical behavior of an electrically actuated microbeam, Journal of Micromechanical Microengineering 12: 759-766.
[10] Younis M.I., Jordy D., Pitarresi J.M., 2007, Computationally efficient approaches to characterize the dynamic response of microstructures under mechanical shock, Journal of Microelectromechanical Systems 16(3).
[11] Tas N., Sonnenberg T., Jansen H., Legtenberg R., Elwenspoek M., 1996, Stiction in surface micromachining, Journal of Micromechanical Microengineering 6(4): 385-397.
[12] Tanner D.M., Walraven J.A., Helgesen K., Irwin L.W., Smith N.F., Masters N., 2000, MEMS reliability in shock environments, in: Proceedings of the IEEE International Reliability Physics Symposium, 129-138.
[13] Meirovitch L., 2001, Fundamentals of Vibrations, McGraw-Hill, Boston, USA.
[14] Béliveau A., Spencer G.T., Thomas K.A., Roberson S.L., 1999, Evaluation of MEMS capacitive accelerometers, Design & Test of Computers, IEEE 16: 48-56.
[15] Brown T.G., Davis B., Hepner D., Faust J., Myers C., Muller P., Harkins T., Hollis M., Miller C., Placzankis B., 2001, Strapdown microelectromechanical (MEMS) sensors for high-G munition applications, IEEE Transactions on Magnetics 37: 336-342.
[16] Lim B.B., Yang J.P., Chen S.X., Mou J.Q., Lu Y., 2002, Shock analysis of MEMS actuator integrated with HGA for operational and non-operational HDD, In: Digest of the Asia-Pacific Magnetic Recording Conference, WE-P-18-01-WE-P-18-02.
[17] Wagner U., Franz J., Schweiker M., Bernhard W., Muller-Fiedler R., Michel B., Paul O., 2001, Mechanical reliability of MEMS-structures under shock load, Microelectronics Reliability. 41: 1657-1662.
[18] Fan M.S., Shaw H.C., Dynamic response assessment for the MEMS accelerometer under severe shock loads, In: National Aeronautics and Space Administration NASA, Washington, DC, TP-2001-20997.
[19] Li G.X., Shemansky J.R., 2000, Drop test and analysis on micro-machined structures, Sensors Actuators A 85: 280-286.
[20] Srikar V.T., Senturia S.D., 2002, The reliability of microelectromechanical systems (MEMS) in shock environments, Journal of Microelectromechanical Systems 11: 206-214.
[21] Yee J.K., Yang H.H., Judy J.W., 2003, Shock resistance of ferromagnetic micromechanical magnetometers, Sensors Actuators A 103: 242-252.
[22] Millet O., Collard D., Buchaillot L., 2002, Reliability of packaged MEMS in shock environments: crack and stiction modeling, In: Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes, 696-703.
[23] Coster J.D., Tilmans H.C., Van Beek J.T.M., Rijks T.G.S.M., Puers R., 2004, The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches, Journal of Micromechanical Microengineering 14: 549-554.
[24] Mukherjee T., Fedder G.K., Ramaswamy D., White J., 2000, Emerging simulation approaches for micromachined devices, IEEE Computer-Aided Design of Integrated Circuits and Systems 19: 1572-1589.
[25] Senturia S.D., Aluru N., White J., 1997, Simulating the behavior of MEMS devices, IEEE Computational Science & Engineering 4(1): 30-43.
[26] Gupta R.K., 1997, Electrostatic pull-in test structure design for in-situ mechanical property measurement of microelectromechanical systems (MEMS), PhD dissertation, MIT, Cambridge, MA, 10-27.
[27] Rezazadeh Gh., Tahmasebi A., Zubtsov M., 2006, Application of piezoelectric layers in electrostatic mem actuators: Controlling of pull-in voltage, Microsystem Technologies 12(12): 1163-1170.
[28] Nayfeh A.H., Mook D.T., 1979, Nonlinear Oscillations, Wiley, New York.
[29] de Silva Clarence W., 2005, Vibration and Shock Handbook, CRC Press, Taylor & Francis Group.
