In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are not generally available; therefore, the obtained differential equations have been solved by using of a step by step linearization method (SSLM) and a Galerkin based reduced order model. The pull-in voltage of the structure and the effect of shock forces on the mechanical behavior of undeflected and electrostatically deflected microbeam have been investigated. The proposed models capture the other design parameters such as intrinsic residual stress from fabrication processes and the nonlinear stiffening or stretching stress due to beam deflection. Manuscript profile

The paper deals with the mechanical behavior of a micro-beam bonded with two piezoelectric layers. The micro-beam is suspended over a fixed substrate and undergoes the both piezoelectric and electrostatic actuation. The piezoelectric layers are poled through the thickness and equipped with surface electrodes. The equation governing the micro-beam deflection under electrostatic pressure is derived according to Euler-Bernoulli beam theory and considering the voltage applied to the piezoelectric layers and Maxwell’s equations for the two dimensional electric potential distribution. The obtained nonlinear equation solved by step by step linearization method and Galerkin weighted residual method. The effects of the electric potential distribution and the ratio of the piezoelectric layer thickness respect to the elastic layer thickness on the mechanical behavior of the micro-beam are investigated. The obtained results are compared with the results of a model in which electric potential distribution is not considered. Manuscript profile

The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been used to solve the governing static and dynamic equations, respectively. The equilibrium positions or fixed pints of the system have been determined and the calculated static and dynamic pull-in parameters have been validated by previous experimental and theoretical results and a good agreement has been achieved. The frequency response of the system has been studied and illustrated that changing applied bias DC voltage affects the resonance frequency and maximum amplitude of the system vibrations. Then, phase diagram of the system for various damping ratio and excitation frequencies has been gained. It has been shown that by changing the bias DC voltage applied on the electrostatically-actuated micro-beam, which can be used as a varactor in phase shifter circuit, the stiffness of the micro-beam changes and consequently the phase shifting can be controlled. Finally, effect of the geometrical and mechanical properties of the micro-beam on the value of the phase shifting has been studied. Manuscript profile

This paper presents mechanical behavior of a functionally graded (FG) cantilever micro-beam subjected to a nonlinear electrostatic pressure and thermal moment considering effects of material length scale parameters. Material properties through the beam thickness direction are graded. The top surface of the micro-beam is made of pure metal and the bottom surface from a mixture of metal and ceramic. The material properties through the thickness direction follow the volume fraction of the constitutive materials in exponential function form. The governing nonlinear thermo-electro-mechanical differential equation based on Euler-Bernoulli beam theory assumptions is derived using modified couple stress theory (MCST) and is solved using the Galerkin based weighted residual method. The effects of the electrostatic pressure and temperature changes on the deflection and stability of the FGM micro-beam, having various ceramic constituent percents, are studied. The obtained results are compared with the results predicted by classic theory (CT) and for some cases are verified with those reported in the literature. Manuscript profile

Thermoelastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for different ambient temperatures. Effects of the geometrical parameters on TED and the critical thickness are investigated. Furthermore, the effect of applied bias DC voltage on TED for an electrostatically deflected micro-plate is also investigated. Manuscript profile

In this paper, the quality factor of thermo-elastic damping in an electro-statically deflected micro-beam resonator has been investigated. The thermo-elastic coupled equations for the deflected micro-beam have been derived using variational and Hamilton principles based on modified couple stress theory and hyperbolic heat conduction model. The thermo-elastic damping has been obtained discretizing the governing equations over spatial domain and applying complex frequency approach. The effects of the applied bias DC voltage, playing simultaneously role of an external force and softening parameter, on the quality factor have been studied. The obtained results of the modified couple stress and classic theories are compared and the effects of the material internal length-scale parameter on the differences between results of two theories have been discussed. In addition, the effects of different parameters such as beam length and ambient temperature on the quality factor have been studied. Manuscript profile